JPH0363876B2 - - Google Patents
Info
- Publication number
- JPH0363876B2 JPH0363876B2 JP11264284A JP11264284A JPH0363876B2 JP H0363876 B2 JPH0363876 B2 JP H0363876B2 JP 11264284 A JP11264284 A JP 11264284A JP 11264284 A JP11264284 A JP 11264284A JP H0363876 B2 JPH0363876 B2 JP H0363876B2
- Authority
- JP
- Japan
- Prior art keywords
- circuit
- normal direction
- pattern
- sequentially
- value
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007689 inspection Methods 0.000 claims description 27
- 238000003708 edge detection Methods 0.000 claims description 10
- 238000006243 chemical reaction Methods 0.000 claims description 7
- 238000001514 detection method Methods 0.000 claims description 7
- 238000010586 diagram Methods 0.000 description 22
- 230000007261 regionalization Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 239000000470 constituent Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Image Processing (AREA)
- Closed-Circuit Television Systems (AREA)
- Image Analysis (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Character Discrimination (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59112642A JPS60256290A (ja) | 1984-06-01 | 1984-06-01 | パタ−ン検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59112642A JPS60256290A (ja) | 1984-06-01 | 1984-06-01 | パタ−ン検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60256290A JPS60256290A (ja) | 1985-12-17 |
| JPH0363876B2 true JPH0363876B2 (en]) | 1991-10-02 |
Family
ID=14591837
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59112642A Granted JPS60256290A (ja) | 1984-06-01 | 1984-06-01 | パタ−ン検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60256290A (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6361910B1 (en) * | 2000-02-03 | 2002-03-26 | Applied Materials, Inc | Straight line defect detection |
-
1984
- 1984-06-01 JP JP59112642A patent/JPS60256290A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60256290A (ja) | 1985-12-17 |
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